Excelyze Manual Prober
(for 12-inch wafer Low Current Measurement)
Features
Excelyze
For 12-inch wafer Manual Prober
Excelyza means Excellent and Analyzing. Excelyze is high-quality engineering prober that offers excellent operability and enables high-precision analysis.
Excelyze is designed for focusing on ease of use and allowing users to maximize their development and analysis time.
Low-Current Measurement
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01Shielded structure supporting low-current measurements on the order of fA (femtoamperes)
High & Low Temperature Measurement
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01Chamber-style test stage supporting wide-range thermal measurements from −40℃ to +300℃
Safety
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01First-contact detection feature prevents damage to devices and probes
* Optional (requires motorized manipulator)
Stable Contact
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01Automatic contact compensation ensures stable measurements without re-alignment, even when switching between temperature extremes
* Optional (requires motorized manipulator)
Standard model for systems and software of major measuring instrument manufacturers
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01Keysight Technologies
B1500A Semiconductor Device Parameter Analyzer EasyEXPERT
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02Keithley Instruments
Systems and measuring instruments with ACS (measurement software)
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03Can be customized for other measuring instruments and software
A wide variety of options and customization
- Temperature-Dependent Characterization
Supports evaluation of temperature-dependent characteristics using a high-performance thermal chuck ranging from -60°C to +300°C. - Wafer Load Box
Equipped with a wafer load box that allows for wafer exchange while maintaining stable high or low-temperature environments. - Motorized Manipulators
Features motorized manipulators that ensure high-precision contact while protecting both the device under test (DUT) and the probes. - Probe Card Compatibility
The use of dedicated adapters allows for the seamless integration of probe cards. - RF Measurement Support
Compatible with RF probes and RF probe calibration substrates for high-frequency testing. - Fully Customizable
The system can be fully customized to meet your specific application requirements and measurement objectives.
Specifications: Excelyze Manual Prober for Low Current Measurement (for 12-inch wafer)
| Maximum wafer size | 0.2μm |
|---|---|
| XY travel resolution | 1μm |
| XY Repeat accuracy in the positioning stage |
0.2μm |
| Z travel resolution | 1μm |
| Z Repeat accuracy in the positioning stage |
±2μm |
| θ stroke | ±5° |
| θ travel resolution | 0.00008° |
| Control interface | GP-IB |
| External dimensions (WxDxH) |
1,000mm × 1,200mm × 1,874mm |
| System weight | Approx. 800kg |
List of Wafer Prober Products
-
Semi-Automatic Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 6-inch wafer/8-inch wafer) -
Manual Prober
(for 12-inch wafer) -
Personal Manual Prober
(for 2-inch wafer/4-inch wafer) -
Excelyze Manual Prober
(for 12-inch wafer)
