Excelyze Manual Prober
(for 12-inch wafer Low Current Measurement)

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Wafer Prober
Excelyze Manual Prober (for 12-inch wafer Low Current Measurement)

Features

Excelyze

For 12-inch wafer Manual Prober

Excelyze means Excellent and Analyzing. Excelyze is a high-quality engineering prober that offers excellent operability and enables high-precision analysis.
Excelyze is designed to focus on ease of use and allow users to maximize their development and analysis time.

Low-Current Measurement

01Shielded structure supporting low-current measurements on the order of fA (femtoamperes)

High & Low Temperature Measurement

01Chamber-style test stage supporting wide-range thermal measurements from −40℃ to +300℃

Safety

01First-contact detection feature prevents damage to devices and probes

* Optional (requires motorized manipulator)

Stable Contact

01Automatic contact compensation ensures stable measurements without re-alignment, even when switching between temperature extremes

* Optional (requires motorized manipulator)

Standard Model for Systems and Software of Major Measuring Instrument Manufacturers

01Keysight technologies

B1500A Semiconductor Device Parameter Analyzer EasyEXPERT
02Keithley instruments

Systems and measuring instruments with ACS (measurement software)
03Can be customized for other measuring instruments and software

A Wide Variety of Options and Customization

Temperature-Dependent Characterization
Supports evaluation of temperature-dependent characteristics using a high-performance thermal chuck ranging from −60°C to +300°C.
Wafer Load Box
Equipped with a wafer load box that allows for wafer exchange while maintaining stable high or low-temperature environments.
Motorized Manipulators
Features motorized manipulators that ensure high-precision contact while protecting both the device under test (DUT) and the probes.
Probe Card Compatibility
The use of dedicated adapters allows for the seamless integration of probe cards.
RF Measurement Support
Compatible with RF probes and RF probe calibration substrates for high-frequency testing.
Fully Customizable
The system can be fully customized to meet your specific application requirements and measurement objectives.

Specifications: Excelyze Manual Prober for Low Current Measurement (for 12-inch wafer)

Maximum wafer size	φ300mm
XY travel resolution	0.2μm
XY Repeat accuracy in the positioning stage	±1μm
Z travel resolution	0.2μm
Z Repeat accuracy in the positioning stage	±1μm
θ stroke	±5°
θ travel resolution	0.00008°
Control interface	GP-IB
External dimensions (WxDxH)	1,000mm × 1,200mm × 1,874mm (excluding options)
System weight	Approx. 800kg (excluding options)