Accessories / Options and Maintenance Parts
Accessories for wafer probers, and all options and maintenance parts
We offer a variety of accessories for various measurements, options for preparing the measurement environment, and other maintenance parts to meet customers' requirements.
A variety of accessories and contact jigs for probers, allowing you to choose the ones you need according to application.
An additional purchase of these products as spare parts is also possible.
RF Probe
Radio波やμ波等の高周波測定用接触子を持つ高周波対応プローブです。
- 高周波測定領域
Single GSG：DC～40GHz、Single GS/SG ・Dual ：DC～20GHz - 高いコンタクト性能（低針圧、短スクラブ、長寿命）
- 量産／研究開発用途としてプローバやマニピュレータに搭載が可能
Coaxial Probe Needle (for Low Current and Low Resistance/Capacitance Measurement)
To use a needle, its outer conductor must be connected to the guard or shield of a measuring instrument.
- Reduces leakage and noise, allowing highly accurate low current measurement
- Kelvin probes for low voltage/low resistance and for capacitance measurement are also available
- We offer an extensive lineup of needles of different shapes and materials, allowing you to choose the most suitable probe for the device to be measured
- * To use a needle, you must secure it to a micro manipulator.
- * Various cables for connection to a measuring instrument are also available.
Precision Probe Needle
Single probe needle with a simple structure.
- Needle tips with various shapes and sizes are available
- You can choose the most suitable probe for the device to be measured
- * To use a needle, you must secure it to a micro manipulator.
- * Various cables for connection to a measuring instrument are also available.
Micro Manipulator
Precisely control the probe position when a probe is contacting a wafer.
- Allows contact in several micron patterns
- Extensive lineup includes a low-cost, easy-operation type and a type that allows highly precise positioning
- A manipulator for low current, featuring superior shield and insulation characteristics, is also available
Connecting Cable
Cables used to connect a probe needle to a measuring instrument.
- We offer various types of cables, including a junction type for connecting a probe needle to a connector panel, a type for direct connection to a measuring instrument, and a type that can be soldered at one end
- Coaxial cables for low current measurement and for chuck element are also available
- * An optional prober connector panel is needed to use a cable for connection to a connector panel.
A variety of optional items and maintenance parts for probers, allowing you to choose the ones you need according to application.
An additional purchase of these products as spare parts is also possible.
Options
Shielding Box
Covers an entire prober to shield it from light and electrical noise.
- Allows highly accurate measurement by controlling photoexcitation and noise
- Can be used together with a vibration isolator
- Available types include a hatchback type and a double-door type—you can choose according to the installation environment
Connector Panel
A connector panel is a plate with a junction connector for connecting a measuring instrument to a probe.
- To be installed on a shielding box to prevent entry of noise and light
- Connectors suitable for various measuring instruments and applications are available
- Various types of connecting accessory cables for connecting a junction connector to a probe are also available
- *The connector panel box is attached to the rear of the main units of 708fT and AP-80A
Vibration Isolator
A vibration isolator is what a manual prober is set on to prevent the influence of ambient vibration.
- Reduces noise caused by vibration, helping achieve highly accurate low voltage and low current measurement
- Desktop type as well as desk type are available
- Can be combined with a shielding box
Work Table
A table on which a manual prober is installed.
- Can also be used for organizing accessories
- Easy to move and secure with caster stoppers
Model AT-200BTemperature Controller for Hot Chuck Model TC-6CHot Chuck (for 6-inch wafer) Model TC-8Hot Chuck (for 8-inch wafer) Model TC-80HLow Noise Type Hot Chuck (for 8-inch wafer)
Used together with the MJC Prober to evaluate temperature properties of the device
- * MJC Prober use ONLY
- Easy parameter setting on the LCD touch screen
- GP-IB interface control supports automation of temperature cycle test, sequence measurement, etc.
- Integration of the general PID control and a unique control method allows quick and highly accurate temperature control
- Use of low-noise-type direct-current regulated power supply for heat source control
- Safety design with overtemperature protector, abnormal ambient thermal detection function, etc. Prevents accidents caused by thermal runaway as well as damage to measuring devices, probes, and probers.
- Range of set temperature
TC-6C・TC-8：+40℃～+300℃
TC-80H ：+40℃～+200℃
CCD Camera
To be used for projecting microscope images onto a large screen or for storing image data.
- Cameras of various resolutions can be selected
- Used mounted on microscopes
Microscope Scanner
Allows highly accurate scan of a microscope in the direction of the X-axis or the Y-axis.
- Enables highly accurate control of the microscope position
- Obtains high-resolution images of micro devices with efficient operation
Probe Card Adapter
To be set on a prober to secure a probe card on it.
- Enables probe card replacement with a simple operation
- Enables fast adjustment of the probe card position or tilt
- Holds probe card securely to achieve stable wafer contact
Maintenance Parts
Z Driver Lever
Base plate height can be switched between 3.5 mm, 0.3 mm, and 0 position needle contact
- Replacement of the Z driver alone is possible
Manual Switch
The air bearing stage can be levitated at the push of a switch
- Replacement of the manual switch only is possible
Option Availability
| Prober model | 705C | MP-10C | 705A-WG7 | 708fT | AP-80A |
|---|---|---|---|---|---|
| Shielding Box | ○ | ○ | ○ | ※ | ※ |
| Probe Card Adapter | ○ | ○ | ○ | ■ | ○ |
| Connector Panel | ○ | ○ | ○ | ○ | ○ |
| Microscope Scanner | ○ | ○ | ○ | ○ | − |
| Work Table | ○ | ○ | ○ | ○ | − |
| Vibration Isolator | ○ | ○ | ○ | ○ | − |
| CCD Camera | ○ | ○ | ○ | ○ | ※ |
- ○：Option available
- ※：Equivalent function is equipped with the prober as a standard function
- ■：Customizable