Personal Manual Prober
(for 2-inch wafer/4-inch wafer)
Features
Model PMP-2
Model PMP-4
Personal Manual Prober for 2-inch wafer / 4-inch wafer
Compact personal manual prober series covering a wide variety of applications
Compact
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01Small size and light weight prober for small diameter wafers
Fully portable for your personal use.
Changeable layout to match various applications
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01XYZ moveable wafer stage and changeable prober internals
The stage can be freely moved or fixed, making it easy to position the probe. With its changeable internal layout, adding accessories to suit various applications is possible.
Highly Accurate Measurements
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01Low noise / low leakage with 3-layer design of wafer chuck, guard and shield
Enables reliable and stable fA / μV level measurements.
Specifications: Personal Manual Prober Model PMP-2 (for 2-inch wafer)
| Maximum wafer size | φ50mm |
|---|---|
| X / Y stage travel | X: 60mm Y: 60mm (In case of attaching the slide rail) |
| Ζ stroke | 5mm |
| External dimensions (WxDxH) |
300×300×260mm (excluding projection portion) |
| Weight | 12kg (excluding options) |
Specifications: Personal Manual Prober Model PMP-4 (for 4-inch wafer)
| Maximum wafer size | φ100mm |
|---|---|
| X / Y stage travel | X: 100mm Y: 100mm(In case of attaching the slide rail) |
| Ζ stroke | 5mm |
| External dimensions (WxDxH) |
350×370×260mmmm (excluding projection portion) |
| Weight | 14kg (excluding options) |
*Both PMP-2 and PMP-4 include: Triax – SMA connector plate for SMU, manipulator (x3), coaxial probe needle (x3), coaxial interconnect cable (x4), and vacuum pump.
*Both PMP-2 and PMP-4 don't support thermal chuck and temperature controller.
List of Wafer Prober Products
-
Semi-Automatic Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 6-inch wafer/8-inch wafer) -
Manual Prober
(for 12-inch wafer) -
Personal Manual Prober
(for 2-inch wafer/4-inch wafer)
