Semi-Automatic Prober
(for 8-inch wafer Low Current Measurement)
Features
Model AP-80A
For 8-inch wafer Semi-Automatic Prober
High-performance semi-automatic prober capable of measuring fA-level low currents
Low current measurement
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01The fully-guarded structure allows accurate low current measurement down to fA-level
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02This model allows low-noise, high-accuracy measurement
Easy operation
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01Both external automatic control and manual joy stick operation (six movement modes) are possible
Both semi-automatic operation and manual operation are easy, which improves measurement efficiency.
Standard model for systems and software of major measuring instrument manufacturers
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01Keysight Technologies
B1500A Semiconductor Device Parameter Analyzer EasyEXPERT
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02Keithley Instruments
Systems and measuring instruments with ACS (measurement software)
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03Can be customized for other measuring instruments and software
A wide variety of options and customization
- Can be equipped with hot chuck (+40℃ to +200℃) for evaluation of temperature-dependent properties
- Can be equipped with a probe card for low current by using a probe card adapter
- Customizable according to intended use
Specifications: Model AP-80A Semi-Automatic Prober for Low Current Measurement (for 8-inch wafer)
| Maximum wafer size | φ200mm |
|---|---|
| Stage travel | X: 210mm Y: 250mm |
| Travel resolution | 1μm |
| Accuracy in the positioning stage |
±10μｍ |
| Repeat accuracy in the positioning stage |
±2μｍ |
| Z stroke | 9mm+0.5mm (overdrive) |
| Θ travel | ±5° |
| Control interface | GP-IB |
| External dimensions (WxDxH) |
820mm×930mm×1, 220mm (excluding options) |
| System weight | 500kg (excluding options) |
List of Wafer Prober Products
-
Semi-Automatic Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 8-inch wafer Low Current Measurement) -
Manual Prober
(for 6-inch wafer/8-inch wafer) -
Manual Prober
(for 12-inch wafer) -
Personal Manual Prober
(for 2-inch wafer/4-inch wafer)
